MEMS scanner inspection system
Ideal for inline inspection, MEMS scanner inspection system.
This is an inspection device for measuring the optical and electrical characteristics of MEMS optical scanners, designed for production lines and research and development. It is capable of measuring resonant-type resonance characteristics and drift. A new time measurement method allows for reduced inspection cycle times for maximum swing angle measurements. The interface can be electromagnetic drive, electrostatic drive, or piezoelectric drive. Its compact design makes it ideal for inline inspection. ○ Wobble measurement (triangular slit time variation detection method) Measurement resolution: 1 micrometer Measurement range: 30 minutes Beam speed: less than 4000 m/s ○ Jitter measurement (two-point time interval detection method) Set position: arbitrarily set (plus or minus 50 degrees) Measurement resolution: 0.1 ns ○ Maximum swing angle measurement: measurement resolution 0.1 ns ○ Resonant frequency: measurement resolution 0.1 ns ○ Temperature: measurement resolution 0.1 degrees
